Microscience 2006 Learning Zone

Veeco introduces Automated Optical Profiler for Dynamic MEMS measurements

New automated instrument provides both static and dynamic functionality

07 June 2006: WOODBURY, N.Y.--(BUSINESS WIRE)-- Veeco Instruments Inc. (Nasdaq: VECO), announced the introduction of its new automated Wyko(R) NT3300(TM) Optical Profiler with DMEMS (Dynamic Micro Electro Mechanical Systems) measurement option. 
 
According to In-Stat Forecasts, the current rapid growth rate of MEMS sales will continue for the next several years, to a projected six billion units in 2009. With a corresponding, increasing number of unique micro-devices being used in consumer products, the MEMS industry requires metrology tools that can perform both static and dynamic characterization easily and rapidly. According to Jeannine Sargent, Executive Vice President/General Manager Metrology and Instrumentation, "Veeco's automated NT3300 DMEMS system fills this need, enabling manufacturers to accelerate both product reliability and functional development while driving down costs." 
 
David Rossi, Vice President of Marketing, Metrology and Instrumentation, commented, "By adding the DMEMS measurement feature we are enabling further functionality to our best-selling, production-proven optical metrology platform. This option provides a dynamic means to non-destructively measure MEMS devices as they actuate." Manufacturers can use a single automated instrument to simultaneously measure in-plane and out-of-plane dimensions and motion for true assessment of micro-device functionality." 
 
The DMEMS system utilizes a proprietary stroboscopic illuminator and synchronization electronics package that permits the capture of a series of 3D measurement data, generating a video of the sample device as it cycles through its range of motion. Comprehensive, MEMS-focused Wyko Vision(R) software locates features of interest and performs a wide variety of detailed 3D analyses, from determining resonant frequency and shape/distortion to characterizing deflection and other key device parameters. 
 
Other features of the Wyko NT3300 DMEMS optical profiler include angstrom-resolution measurement of features from 0.1 nm to 2 mm in height, a programmable X/Y stage and software for rapid measurement of large surface areas, the ability to ramp intensity to investigate materials with differing reflectivities, and tip/tilt built into the head to eliminate the need to reposition the probe for successive scans. 
 
About Veeco 
Veeco Instruments Inc. provides solutions for nanoscale applications in the worldwide semiconductor, data storage, HB-LED/wireless and scientific research markets. Our Metrology products are used to measure at the nanoscale and our Process Equipment tools help create nanoscale devices. Veeco's manufacturing and engineering facilities are located in New York, New Jersey, California, Colorado, Arizona and Minnesota. Global sales and service offices are located throughout the United States, Europe, Japan and Asia Pacific. Additional information on Veeco can be found at http://www.veeco.com/. 
 
To the extent that this news release discusses expectations about market conditions, market acceptance and future sales of Veeco's products, Veeco's future financial performance, future disclosures, or otherwise makes statements about the future, such statements are forward-looking and are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include the challenges of volatility in end market conditions and the cyclical nature of the data storage, semiconductor, HB-LED/wireless and scientific research markets, risks associated with integrating acquired businesses and the acceptance of new products by individual customers and by the marketplace and other factors discussed in the Business Description and Management's Discussion and Analysis sections of Veeco's Annual Report on Form 10-K for the year ended December 31, 2005, subsequent Quarterly Reports on Form 10-Q and current reports on Form 8-K. Veeco does not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements. 
 

For further information, please contact:

Stephanie Pietri
European Marketing Communication Manager
Veeco Instruments SAS
T: +33 1 64 59 35 20
F: +33 1 64 59 72 22
E: spietri@veeco.fr
W: http://www.veeco-europe.com

 

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