Maskless lithography system has table-top format
µPG101 Table Top Maskless Lithography System
24 April 2006: Heidelberg Instruments has developed a tabletop maskless lithography system, the µPG101. The µPG101 is an extremely economical and easy to use Micro Pattern Generator for direct writing applications and low volume mask making. It is also perfectly suited for rapid prototyping of 2D and 3D microstructures on substrates up to 4 x 4in, and is capable of exposing features down to 5microns, with an address grid of 100nm. The µPG101 maskless lithography system also offers a very small footprint of 600 x 600mm.
It presents a highly flexible, out of the box tool which is capable of layer to layer alignment through its integrated camera system.
Applications include MEMS, bio-MEMS, integrated optics, microfluidics, µTAS, or similar areas requiring microstructures.
Come and see the new µPG101 at Microscience2006 on Stand H1.
For further information, please contact:
Russell Evans
Managing Director
Omniscan Ltd
T: 01244 378009
E: info@omniscan.co.uk
W: http://www.omniscan.co.uk |
